관련링크
Specifications
· Functions: O.C./Current/Blemish/Defect/Resolution/Overlay Test
· Motion: 3 axis Motion & 2 axis Cylinder
· XY motorized stage
· Moving chart & Side Ang Chart
· Dimension: W1210 x D1351 x H1714 (mm)
· T/T : 60sec
· Motion: 3 axis Motion & 2 axis Cylinder
· XY motorized stage
· Moving chart & Side Ang Chart
· Dimension: W1210 x D1351 x H1714 (mm)
· T/T : 60sec